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栅压偏置下的交流参数

2025-09-21 21:00:28

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栅压偏置下的交流参数

  • 当结构加载到 BLAZE 后，在 1 MHz 的频率下施加一个小信号交流扰动，以计算交流参数（电导和电容）随 Vgs 的变化。这还允许用户利用低频近似，通过 TonyPlot 或 DeckBuild 的提取功能获得截止频率。电流、电压和交流参数被保存到日志文件中，而内部结构信息则保存在解文件中，对应的偏置条件为 Vgs=0 V，Vds=2 V
  • 下一步是完整的频域交流仿真，此时 Y 参数矩阵（电导和电容）作为频率的函数被计算，频率范围从 10 Hz 到 50 GHz。这些结果会被存储到日志文件中。此外，如果在日志语句中指定了 s.param，则 S 参数也会被保存到文件中
  • 在仿真结束时，会通过 DeckBuild 的提取功能抽取以下参数：
    • 最大栅源电容
    • Vgs=0 时的栅源电容
    • 最大截止频率
    • Vgs=0 时的截止频率
    • 最大交流电流增益（f=1 MHz）
    • Vgs=0，f=1 MHz 时的交流电流增益
  • 使用 TonyPlot 显示的结果：
    • 跨导随栅压的变化特性
    • S 参数：S12 与 S21 的极坐标图
    • S 参数：S11 与 S22 的 Smith 圆图

输入文件内容

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# (c) Silvaco Inc., 2019
go devedit
DevEdit version="2.1" library="1.15"

work.area left=0 top=-0.01 right=4.5 bottom=0.5

# SILVACO Library V1.15

region reg=1 mat=GaAs color=0xffb2 pattern=0x9 \
	points="0,0 1,0 1.1,0 1.5,0.05 0,0.05 0,0"
#
impurity id=1 region.id=1 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=2e+18 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=1 default

region reg=2 mat=GaAs color=0xffb2 pattern=0x9 \
	points="2.9,0 3.5,0 4.5,0 4.5,0.05 2.5,0.05 2.9,0"
#
impurity id=1 region.id=2 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=2e+18 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=2 default

region reg=3 mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="4.5,0.05 4.5,0.08 0,0.08 0,0.05 1.5,0.05 1.75,0.05 2.25,0.05 2.5,0.05 4.5,0.05"
#
impurity id=1 region.id=3 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=3 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=5e+15 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=3 default

region reg=4 name=delta mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="4.5,0.08 4.5,0.081 0,0.081 0,0.08 4.5,0.08"
#
impurity id=1 region.id=4 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=4 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=8e+18 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=4 default

region reg=5 name=spacer mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="0,0.081 4.5,0.081 4.5,0.084 0,0.084 0,0.081"
#
impurity id=1 region.id=5 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=5 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=5e+15 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=5 default

region reg=6 mat=InGaAs color=0xffc8c8 pattern=0xa \
	points="0,0.084 4.5,0.084 4.5,0.098 0,0.098 0,0.084"
#
impurity id=1 region.id=6 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.78 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=6 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=5e+15 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=6 default

region reg=7 mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="0,0.098 4.5,0.098 4.5,0.101 0,0.101 0,0.098"
#
impurity id=1 region.id=7 imp=Acceptors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=150000000000000 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=7 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=7 default

region reg=8 mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="0,0.101 4.5,0.101 4.5,0.102 0,0.102 0,0.101"
#
impurity id=1 region.id=8 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=8 imp=Donors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=2e+18 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=8 default

region reg=9 mat=AlGaAs color=0xffff96 pattern=0x9 \
	points="0,0.102 4.5,0.102 4.5,0.14 0,0.14 0,0.102"
#
impurity id=1 region.id=9 imp=Acceptors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=100000000000000 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
impurity id=2 region.id=9 imp="Composition Fraction X" color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=0.22 ref.value=0 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=9 default

region reg=10 name=GaAs mat=AlGaAs color=0xffb2 pattern=0x9 \
	points="0,0.14 4.5,0.14 4.5,0.5 0,0.5 0,0.14"
#
impurity id=1 region.id=10 imp=Acceptors color=0x906000 \
	x1=0 x2=0 y1=0 y2=0 \
	peak.value=100000000000000 ref.value=1000000000000 comb.func=Multiply \
	rolloff.y=both conc.func.y=Constant \
	rolloff.x=both conc.func.x=Constant
#
constr.mesh region=10 default

region reg=11 name=source mat=Gold elec.id=1 work.func=0 color=0xe5ff pattern=0xb \
	points="0,0 0,-0.01 1,-0.01 1,0 0,0"
#
constr.mesh region=11 default

region reg=12 name=drain mat=Gold elec.id=2 work.func=0 color=0xe5ff pattern=0xb \
	points="3.5,0 3.5,-0.01 4.5,-0.01 4.5,0 3.5,0"
#
constr.mesh region=12 default

region reg=13 name=gate mat=Gold elec.id=3 work.func=0 color=0xe5ff pattern=0xb \
	points="1.75,0.05 1.75,0 2.25,0 2.25,0.05 1.75,0.05"
#
constr.mesh region=13 default


impurity id=1 imp=Donors color=0x906000 \
	x1=0 x2=1 y1=0 y2=0.08 \
	peak.value=5e+21 ref.value=1e+20 comb.func=Multiply \
	rolloff.y=both conc.func.y="Gaussian (Dist)" conc.param.y=0.048 \
	rolloff.x=both conc.func.x="Error Function" conc.param.x=0.02
impurity id=2 imp=Donors color=0x906000 \
	x1=3.5 x2=4.5 y1=0 y2=0.08 \
	peak.value=5e+21 ref.value=1e+20 comb.func=Multiply \
	rolloff.y=both conc.func.y="Gaussian (Dist)" conc.param.y=0.048 \
	rolloff.x=both conc.func.x="Error Function" conc.param.x=0.02

# Set Meshing Parameters
#
base.mesh height=0.1 width=0.25
#
bound.cond !apply max.slope=28 max.ratio=300 rnd.unit=5e-05 line.straightening=1 align.points when=automatic
#
imp.refine min.spacing=0.02
#
constr.mesh max.angle=90 max.ratio=3000 max.height=1 \
	max.width=1 min.height=0.0001 min.width=0.0001
#
constr.mesh type=Semiconductor default
#
constr.mesh type=Insulator default
#
constr.mesh type=Metal default
#
constr.mesh type=Other default
#
constr.mesh region=1 default
#
constr.mesh region=2 default
#
constr.mesh region=3 default
#
constr.mesh region=4 default
#
constr.mesh region=5 default
#
constr.mesh region=6 default
#
constr.mesh region=7 default
#
constr.mesh region=8 default
#
constr.mesh region=9 default
#
constr.mesh region=10 default
#
constr.mesh region=11 default
#
constr.mesh region=12 default
#
constr.mesh region=13 default
#
# Perform mesh operations
#
Mesh Mode=MeshBuild
refine mode=y x1=0.068 y1=0.0123 x2=1.48 y2=0.038
refine mode=y x1=2.492 y1=0.0106 x2=4.402 y2=0.044
refine mode=y x1=0.106 y1=0.0089 x2=1.511 y2=0.0414
refine mode=y x1=2.515 y1=0.0046 x2=4.357 y2=0.0405
refine mode=x x1=1.571 y1=0.0568 x2=2.417 y2=0.334
refine mode=x x1=0.084 y1=0.0063 x2=0.891 y2=0.3477
refine mode=x x1=3.602 y1=0.0055 x2=4.41 y2=0.3383
refine mode=y x1=0.038 y1=0.0414 x2=1.563 y2=0.0457
refine mode=y x1=2.454 y1=0.0397 x2=4.448 y2=0.044
refine mode=y x1=0.076 y1=0.0551 x2=4.455 y2=0.2887
refine mode=y x1=0.031 y1=0.0524 x2=4.425 y2=0.074
refine mode=y x1=0.068 y1=0.0516 x2=4.44 y2=0.0761
refine mode=y x1=0.023 y1=0.0768 x2=4.463 y2=0.0787
refine mode=y x1=0.084 y1=0.106 x2=4.47 y2=0.1829
refine mode=y x1=0.061 y1=0.1044 x2=4.47 y2=0.1344
refine mode=y x1=0.046 y1=0.1036 x2=4.433 y2=0.1053
refine mode=y x1=0.061 y1=0.0862 x2=4.433 y2=0.0966
refine mode=y x1=0.038 y1=0.0856 x2=4.433 y2=0.0961
refine mode=x x1=1.556 y1=0.0499 x2=2.462 y2=0.2322

imp.refine min.spacing=0.02

constr.mesh max.angle=90 max.ratio=3000 max.height=1 \
	max.width=1 min.height=0.0001 min.width=0.0001
#
constr.mesh type=Semiconductor default
#
constr.mesh type=Insulator default
#
constr.mesh type=Metal default
#
constr.mesh type=Other default


base.mesh height=0.1 width=0.25

bound.cond !apply max.slope=28 max.ratio=300 rnd.unit=5e-05 line.straightening=1 align.Points when=automatic


structure outf=hemtex06_A.str


go atlas

title  GaAs-AlGaAs-InGaAs Pseudomorphic HEMT simulation

# Load the structure generated in DEVEDIT...
# While running in the deckbuild after DEVEDIT input deck the structure is
# transfered automatically: no mesh statement is needed, comment it out

mesh infile=hemtex06_A.str master.in



# Define the workfunction for the gate contact

contact     name=gate   workfunction=4.55

# Define material parameters on material-by-material basis 

material material=GaAs   align=0.6
material material=AlGaAs align=0.6 
material material=InGaAs align=0.6 mun0=12000 mup0=2000 vsat=2.e7 \
                         taun0=1.e-8 taup0=1.e-8 

# Define physical models on material-by material basis
# consrh 浓度相关的srh
models material=GaAs   consrh conmob fldmob print 
models material=AlGaAs consrh conmob fldmob print 
models material=InGaAs srh           fldmob print 


# Include bands potential, and current flowlines into output 
# flowlines：输出 电流流线 (current flow lines)，方便可视化电子/空穴的流动路径。
output con.band val.band flowlines 


# Initial solution

solve    init 
save outf=hemtex06_1.str
tonyplot  hemtex06_1.str

# Apply a set of biases at the gate and drain

solve vgate = 0    
solve vdrain = 0.1
solve vdrain=0.25 vfinal=2.0 vstep=0.25 name=drain

# Frequency domain AC simulation. 

log outf=hemtex06_ac.log master gains s.params inport=gate outport=drain width=50
# 交流小信号分析
# 	 初始频率, 频率步长为 10, 频率按倍数（乘法）递增, 一共取 7 个频率点
solve ac freq=10 fstep=10 mult.f nfstep=7
solve ac freq=1e9
solve ac freq=2e9 fstep=2e9 nfstep=3
solve ac freq=1e10 fstep=5e9 nfstep=8

# Displaying the results

# Plot S-parameters: S12 & S21 in polar coordinates
tonyplot hemtex06_ac.log -set hemtex06_2.set

# Plot S-parameters: S11 & S22 in the form of the Smith Chart

tonyplot  hemtex06_ac.log -set hemtex06_3.set

quit




理解输入代码

  • solve ac freq=10 fstep=10 mult.f nfstep=7

    • 这条语句是 半导体器件模拟软件（例如 Silvaco Atlas） 里的求解命令，用于执行 交流小信号分析 (AC analysis)

    • 🔹 参数解析

      • solve ac
        表示进行交流小信号仿真（AC analysis），即在偏置点上加上一个小的交流扰动，计算器件的交流响应（如电导、电容、阻抗、s-参数等）。

      • freq=10
        初始频率设为 10 Hz。

      • fstep=10
        频率步长为 10。
        这里要结合 mult.f 一起看，因为步长可能是线性增加，也可能是按倍数增加。

      • mult.f
        表示 频率按倍数（乘法）递增。
        也就是说，频率不是线性增加，而是指数式增长。

      • nfstep=7
        表示一共取 7 个频率点。

模拟结果

模型 S 参数：S12 与 S21 的极坐标图 S 参数：S11 与 S22 的 Smith 圆图
hemtex06 hemtex06_1 hemtex06_2
Tags: Silvaco TCAD
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